CODE V 9.81 Delivers Enhancements for Advanced Fabrication Techniques
January 2008 - CODE V® 9.81 optical design software from Optical Research Associates (ORA®) streamlines the fabrication of optical systems by simplifying the correlation of actual test data and design parameters. For example, new aspheric lens tolerancing capabilities based on the work of ORA engineer Dr. John Rogers can be used with the CODE V Fast Wavefront Differential Tolerancing (TOR) feature to tolerance surface errors that are easily measured in production using surface profilometry. These tolerancing capabilities will be especially valuable in the fabrication of optical elements that are either machined directly in metal or plastic, or, in high-volume production, created from mold inserts that are machined.
In addition, CODE V’s ability to utilize measured interferograms of actual lenses has been improved. Specifically, the Fabrication Data analysis feature now provides a way to visualize interferogram data on a lens surface, entrance pupil, or exit pupil, including the ability to see rotation and scaling effects. This simplifies the correlation of measured lens surface deformations or wavefront perturbations with design data.
CODE V 9.81 also delivers enhancements that address the demand for ever smaller features in the microlithographic production of semiconductor wafers. In particular, new software functions provide direct information about the critical dimension (CD) of the image, assuming a one-dimensional, partially coherent image, which is the standard design metric for microlithography. These functions, which have been added to the Partial Coherence analysis and TOR tolerancing features, will help designers learn how small variations in lens parameters affect the CD variation across the chip, assess compensation schemes given a specified tolerance, and understand how a full polarization analysis affects process window computations.
CODE V 9.81 will begin shipping in January 2008. For more information, please send an email to info@opticalres.com.
In CODE V 9.81, the Fabrication Data analysis feature now provides a way to
visualize interferogram data on a lens surface, entrance pupil, or exit pupil,
including the ability to see rotation and scaling effects.
