Calendar

Introduction to CODE V
March 31-April 4, 2008
Pasadena, California
Click here for details and to enroll

Advanced Topics in CODE V April 7-11, 2008
Pasadena, California
Click here for details and to enroll

Introduction to CODE V
Sept. 29-Oct. 3, 2008
Pasadena, California
Click here for details and to enroll

Advanced Topics in CODE V
October 6-10, 2008
Pasadena, California
Click here for details and to enroll

CODE V 9.81 Shipped – View a Demo on ORA's Customer Area of the Web

CODE V 9.81 was shipped to all current customers last month.  This update provides several enhancements to CODE V including:

• Enhancements for Microlithographic Computations: Several enhancements have been made to CODE V's Partial Coherence (PAR) and Tolerancing (TOR) calculations to meet the demand of the microlithographic industry.  New commands in PAR have been added to compute the image width (critical dimension) of a bar object at a given intensity threshold, compute the exposure dose relative to the mask size including a focus exposure matrix, and model the effects of acid migration in the resist. Several existing PAR commands have also been modified to support multiple field and zoom positions.  Several new commands have been added in TOR, as well as enhancements to existing TOR commands, to support defining the critical dimension of an image as a tolerancing metric. 
  
  
• Tolerancing Surface Errors: Two new tolerance definitions have been added to support the modeling of aspheric surface tolerances.  These tolerance types are based on the research of ORA's Dr. John Rogers as described in "Slope Error Tolerances for Optical Surfaces", 2007 Invited Paper, SPIE Optifab Conference (available for download from ORA's Customer Service Web site, www.oraservice.com under CODE V Support > Technical Papers).
  
  
• Interferogram Display Enhancements:  
  The Display > View Interferogram menu item and Fabrication Support (FAB) option, include new interferogram display features that allow users to verify surface deformation or wavefront perturbations defined by INT files are applied properly in your lens model.
  
  
• Additional Enhancements:  Additional enhancements in CODE V 9.81 include:
  
  
  • The Tolerance page in the Surface Property window has been expanded to include tolerance offset definitions
    
    
  • The CODE V Glass catalog has been updated to include the Chengdu Guangming Glass catalog, four new Special catalog glasses, and several updates to materials from Ohara and Sumita.
    
    
  • The ability to include a surface label or number in a Footprint (FOO) plot
    
    
  • The ability to print or save the Interactive Tolerancing performance and compensator summaries as separate outputs
    
    
  • A new macro function, CNVTFIELD, to convert field definition types

View a Demo of CODE V 9.81: A recorded demonstration of the new features included in CODE V version 9.81 can be viewed on ORA's Customer Area of the Web, www.oraservice.com, under CODE V Support > Webinar Recordings.

For more information on the enhancements included in CODE V 9.81, please refer to the CODE V 9.81 Release Notes included with your release media.  A copy of the CODE V 9.81 Release Notes can also be downloaded from www.oraservice.com under CODE V Support > Release Notes.

Updates to ORA's Customer Service Web Site

The following additions have been recently made to ORA's Customer Service area of the web, www.oraservice.com, under CODE V Support:

• The February issue of CODE V Enews, which features a tip on tolerancing radii of curvature is available under CODE V Enews & Tips.

• Recorded demonstrations of the new features included in CODE V 9.81 are available for viewing under Webinar Recordings.
  
  
• The CODE V 9.81 Release Notes are available under Release Notes.
  
  
• 3 CODE V Macros have been updated/added under Macros and User-defined Feature Downloads, including:
  
  
  • A new macro, wt_rgb.seq, which can be used to independently normalize the RGB image components to see the effect on a previously saved image simulation (IMS) result is available under CODE V Macros from ORA Tech Support
    
    
  • The newglassprv.seq macro that includes private catalog definitions of glass from various vendor catalogs that include updated dispersion information has been updated and is available under CODE V Macros from ORA Tech Support

• An updated version of the vp_plot.seq macro, used to list and plot the Abbe values and partial dispersions for glasses in the CODE V glass catalog and sample lenses, is available under Updated CODE V Sample Macros.

CODE V Training Classes

The Spring 2008 CODE V Training Classes, to be held at ORA's Pasadena Headquarters, are now open for registration:

• Introduction to CODE V: March 31 – April 4, 2008
• Advanced Topics in CODE V: April 7 – 11, 2008

To obtain more information about these courses, including a registration form, please follow the links under the Calendar section on the left side of this newsletter.